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P-820 Purgemeter

P-820 Purgemeter

General

P-820

Very widely used at various semiconductor production devices.
Alarm version is available.

Major Application

Gas flow measurement at semiconductor production devices

Short Specifications

Measuring object Liquids and gases
Flow range Air (0C, 0MPa)
Max. : 12 to 60L/min (nor)
Min. : 4 to 20mL/min (nor)
Water (Density 1.0g/cm3, Viscosity 1.0mPas)
Max. : 0.2 to 2L/min
Min. : 5 to 50mL/min
Process connection Rc1/4 (Option : Rc1/8, NPT1/8, NPT1/4, 1/4SW, 3/8SW, 1/4VCR, 3/8VCR)
Fluid pressure Max. 0.8MPa
Fluid temperature Max. 120°C (80°C in case of CR packing)
Accuracy 3%F.S. (224mm center to center connection length)
5%F.S. (114mm center to center connection length)
Material Body: SCS14
Tapered tube: Heat-resistant glass
Float: SUS316, Glass, Ruby *
Packing: FPM (Option: CR)
Valve: SUS316
* Proper material to be selected according to the specifications
Notes Bellows valve, Needle valve and Alarm contact are available.
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