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Instrument
Flowmeter > P-774

P-774 Purgemeter

General

P-774

Small sized All PFA moulded construction Purgemeter with 100mm length.
They are called Ultra Clean Purgemeter.

Major Application

Pure / Ultra Pure water and chemicals at semiconductor production devices and facilities.

Short Specifications

Measuring object Liquids (Water, pure water, ultra-pure water and chemical liquids)
Flow range · Water (Density 1.0g/cm3, Viscosity 1.0mPa·s)
Max. : 0.7 to 7L/min
Min. : 0.1 to 1L/min
Process connection φ10 Pillar fitting
Fluid pressure Max. 0.5MPa
Fluid temperature Max. 60 °C
Accuracy ± 5%F.S.
Material Body: PFA integrated mold
Tapered tube : PFA integrated mold
Float: PTFE
Valve: PCTFE
Notes Needle valve and Alarm contact are available.
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