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Instrument
Flowmeter > P-773

P-773 Purgemeter

P-773 Purgemeter

General

P-773

All PFA moulded construction with compact design of 115mm length. which eliminates the sealing. They are called Ultra Clean Purgemeter.
Metallic material is not used even for external constructions to avoid production of metallic ion and rust. PFA tube end connection is provided. P-773 is suitable for assembling onto semiconductor production devices.

Major Application

Pure / Ultra Pure water and chemicals at semiconductor production devices.

Short Specifications

Measuring object Liquids (Water, pure water, ultra-pure water and chemical liquids)
Flow range · Water (Density 1.0g/cm3, Viscosity 1.0mPa·s)
Max. : 1 to 10L/min
Min. : 0.1 to 1L/min
Process connection Tube end connection : 3/8 to φ12
(Option : Rc1/4, Rc3/8, NPT1/4, NPT3/8)
Fluid pressure Max. 0.5MPa
Fluid temperature Max. 60 °C
Accuracy ± 5%F.S.
Material Body : PFA integrated mold
Tapered tube : PFA integrated mold
Float: PTFE
Valve: PCTFE
Notes Needle valve and Alarm contact are available.
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