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Instrument
Flowmeter > P-772

P-772 Purgemeter

General

P-772

All PFA moulded construction which eliminates the sealing same as P-771. They are also called Ultra Clean Purgemeter. Metallic material is not and PFA tube end connection is provided. P-772 is suitable for flow measurement of Pure / Ultra Pure water and chemicals at semiconductor production devices and facilities.

Major Application

Pure / Ultra Pure water and chemicals at semiconductor production devices and facilities.

Short Specifications

Measuring object Liquids (Water, pure water, ultra-pure water and chemical liquids)
Flow range · Water (Density 1.0g/cm3, Viscosity 1.0mPa·s)
Max. : 4.5 to 45L/min
Min. : 0.06 to 0.6L/min
Process connection Tube end connection / OD : 19mm, ID 15.8mm
(Option : Rc1/2, Rc3/4, NPT1/2, NPT3/4 )
Fluid pressure Max. 0.5MPa
Fluid temperaature Max. 60 °C(High temperature version up to 90°C)
Accuracy ± 5%F.S.
Material Body : PFA integrated mold
Tapered tube : PFA integrated mold
Float: PTFE
Valve: PCTFE
Notes Needle valve and Alarm contact, and Analog output are available.
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