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Instrument
Flowmeter > P-771

P-771 Purgemeter

General

P-771

All PFA moulded construction which eliminates the sealing. They are called Ultra Clean Purgemeter.
Metallic material is not used even for external construction to avoid production of metallic ion and rust. PFA tube end connection is provided. P-771 is suitable for flow measurement of Pure / Ultra Pure water and chemicals at semiconductor production devices and facilities.

Major Application

Pure / Ultra Pure water and chemicals at semiconductor production devices and facilities.

Short Specifications

Measuring object Liquids (Water, pure water, ultra-pure water and chemical liquids)
Flow range · Water (Density 1.0g/cm3, Viscosity 1.0mPa·s)
Max. : 0.2 to 2L/min
Min. : 3 to 15mL/min
Process connection Tube connection / OD : 6.35mm
(Option : Rc1/8, Tube connection / OD : 6mm,8mm)
Fluid pressure Max. 0.5MPa
Fluid temperature Max. 60 °C
Accuracy ± 5%F.S.
Material Body : PFA integrated mold
Tapered tube : PFA integrated mold
Float: PTFE
Valve: PCTFE
Notes Needle valve and Alarm contact are available.
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