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Instrument
Flowmeter > P-810

P-810 Purgemeter

General

P-810

Most suitable for gas flow measurement at various semiconductor production devices.
External sealing mechanism offers better sealing function. High Quality version with EP polishing is available.

Major Application

Gas flow measurement at semiconductor production devices
(Low leak application)

Short Specifications

Measuring object Liquids and gases
Flow range · Air (0°C, 0MPa)
Max. : 6 to 60L/min (nor)
Min. : 5 to 50mL/min (nor)
· Water (Density 1.0g/cm3, Viscosity 1.0mPa·s)
Max. : 0.2 to 2L/min
Min. : 5 to 50mL/min
Process connection Rc1/4 (Option : Rc1/8, NPT1/8, NPT1/4, 1/4SW, 3/8SW, 1/4VCR, 3/8VCR)
Fluid pressure Max. 0.8MPa
Fluid temperature Max. 120 °C (80°C in case of CR packing)
Accuracy ±3%F.S. (±5%F.S in case of 145mm version)
Material Body: SCS14 (Option: SUS316, SUS316L)
Tapered tube: Heat-resistant glass
Float: SUS316, Glass, Ruby *
Packing: Fluororubber (Option: CR)
Valve: FPM, SUS304
* Proper material to be selected according to the specifications
Notes Bellows valve, Needle valve and Alarm contact are available.
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