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Instrument
Flowmeter > P-520

P-520 Purgemeter

General

P-520

Resin made Purgemeter which eliminates the introduction metallic ion. P-520 is suitable for measurement of Pure / Ultra Pure water flow measurement at Semiconductor production facilities. Alarm contact is additionally possible.

Major Application

Pure / Ultra Pure water

Short Specifications

Measuring object Liquids (Water, pure water, ultra pure water)
Flow range · Water (Density 1.0g/cm3, Viscosity 1.0mPa·s)
Max. : 12 to 60L/min
Min. : 1 to 10L/min
Process connection Rc1/2 (Option : Rc3/4, NPT1/2, NPT3/4 etc.)
Fluid pressure Max. 0.5MPa
Fluid temperature Max. 60°C (80°C in case of SUS304 or PTFE body)
Accuracy ± 5%F.S.
Material Body: PVC (Option: SUS304, PTFE)
Tapered tube: Heat-resistant glass
Float: PVC , SUS304, PTFE *
Packing: FPM (Option: EPDM)
Valve: PVC (Option: PTFE)
* Proper material to be selected according to the specifications
Notes Needle valve and Alarm contact are available.
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